Our Laser Thermal Annealing (LTA) solutions are powered by Excico’s proprietary High Energy UV Laser. Benefiting from 15⁺ years of development, originally funded by EC development programs in the 1990s, the LTA Excimer Laser is a production proven platform, offering unmatched performance and productivity.

• With Energy >10 Joules per pulse, the LTA provides 10X higher energy than any other commercially available UV laser, providing a unique large area laser annealing solution.
• The Pulse shape of the LTA offers optimum process performance by providing low thermal budget/ultra-fast annealing (< µs) while keeping temperature ramp slow enough to stay clear of damage level.
• Unmatched Pulse to pulse stability providing high yield and process control