Excico


We bring you the only enabling solution perfecting nanolayer manufacturing


Excico is an equipment company focusing on the semiconductor device market and related industries. The Company designs, manufactures and markets high energy Exciplex lasers tools dedicated to thin film processing.
 

Technology & Process

 

  • The only Laser Melt annealing tool available for semiconductor dopant activation, film recrystallisation, annealing and sintering.
  • UV Light processing enabling ultra-shallow (7 nm) annealing depth.
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    Excico Products & Services: Laser Annealing

     

    POWER DEVICES with less process steps and better performances.

    CMOS Imaging Sensor with top-class S/N ratio.

    The ultra-low thermal budget processes enabled by the Excico annealing equipments...

     
    LATEST NEWS SEE ALL NEWS
     

    Happy New Year !

    Sunday, 01 January 2012 02:36

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    Excico in Subtherm conference on Oct 27th 2011

    Wednesday, 19 October 2011 00:00


    Excico is invited to present a review on advanced anneali

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    Excico publishes an article in Yole '3D Packaging' September 2011 issue

    Tuesday, 20 September 2011 00:00


    E

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