We bring you the only enabling solution perfecting nanolayer manufacturing

Excico is an equipment company focusing on the semiconductor device market and related industries.

The Company designs, manufactures and markets high energy Exciplex lasers tools dedicated to thin film processing.

Technology & Process 

•  The only Laser Melt annealing tool available for semiconductor dopant activation, film recrystallisation, annealing and sintering.

• UV Light processing enabling ultra-shallow (7 nm) annealing depth.

Excico Products & Services: Laser Annealing

POWER DEVICES with less process steps and better performances.

CMOS Imaging Sensor with top-class S/N ratio.

The ultra-low thermal budget processes enabled by the Excico annealing equipments...